Tīmeklis2012. gada 3. sept. · Basic Plasma Etch Procedure: Polyetch mechanism: Over Etch *Si ionbombardment Br ionbombardment High selectivity passivation.End point Detection Any parameter which can indicate plasmaetch can endpoint detection, EPD. Opticalspectrum Emission OpticalIntensity Interference. PlasmaImpedance, … TīmeklisTO EFFECTIVELY PM THE LAM 2300 METAL ETCH CHAMBER IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY AND PARTICLE …
LAM 2300 Metal ETCH Procedure Light Deposition PM - 豆丁网
TīmeklisVacuum Chamber: LAM 2300 METAL ETCH Vacuum Chamber Process Residue:PROCESS INDUCED RESIDUE Vacuum Chamber Components:CHAMBER, SLIT VALVE, CHUCK AND PARTS Old Procedure: 6 HOURS, THREE TECHS, using ScotchBrite®, DI water, 150+ wipes & IPA New Procedure: 2 HOURS, ONE TECH, … Tīmeklis2016. gada 29. maijs · LAM 2300 Metal ETCH Procedure Light Deposition PM 文档格式: .pdf 文档大小: 1.12M 文档页数: 7 页 顶 /踩数: 0 / 0 收藏人数: 5 评论次数: 0 文档热度: 文档分类: 高等教育 -- 工学 文档标签: LAM 2300 Metal ETCH Procedure Light Deposition PM 系统标签: etch lam metal deposition procedure scrubpad jared sudhoff
LAM RESEARCH 2300 VERSYS METAL L Etchers & Ashers - Moov
TīmeklisНазначение: травление поликремния, формирование узкощелевой изоляции, травление металлов (Versys Kiyo 45 Metal) и пр. До 4-х процессных камер. Варианты: 2300 Kiyo45 Etch, 2300 Micro Wave Strip, 2300 Kiyo45 Poly Etch, 2300 Versys Kiyo 45 Metal Tīmeklis2016. gada 30. sept. · Lam 2300 Versys Manual - tiratedio.com ... OGD20V-6RM-K PM-2/3:2300 Versys Metal Etch. Manual LAMsensor plug 90nm Processes New 2300 Versys Star TM introduces unique Related PDFs: certified professional constructor exam study guide, sea ray mercruiser 120 service manual, parts manual 40hpmercury … jared suchan